Selective dissolution of hafnium-peroxo-sulfate films in aqueous tetramethylammonium hydroxide enables extreme UV lithographic patterning of sub-...
CSMC Tags: publication
The reaction path from aqueous oxohydroxometalate [(CH3)4N]6[H2Ta6O19]·xH2
A variety of metal oxide films (InGaOx, AlOx, “HafSOx”) prepared from aqueous solutions wereTags: publication
Aqueous Hf sulfate−peroxide solutions, “green” precursors for lithographically patterned thin films, exhibit complex behavior, forming polynuclear...